Fabrication Record: Kingsbury1

Sample: S20240419BMG

Device: Kingsbury1

Start Date: 2024-04-19 00:00

Operator: Kieran

Status: complete

Completion: 100%

Generated: 2025-11-07 16:40:33

Fabrication Steps

Step 1: Nominal Design Reference
COMPLETE
Document GDS design for fabrication reference
Completed: 2025-11-07 16:13:27

Scans (1):

GDS.png

File TypeImage File
Original FilenameGDS.png
Image Size403 x 271 pixels
FormatPNG
ModeRGB
File Size78.9 KB
Step 2: 12μm Step Edge Mapping
COMPLETE
Map step edge structure for alignment and future device location
Completed: 2025-11-07 16:13:27

Scans (1):

12um_highmiscut_20240424-093814_Kingsbury Si(001)H--STM_AtomManipulation--8_1.tiff

File TypeImage File
Original Filename12um_highmiscut_20240424-093814_Kingsbury Si(001)H--STM_AtomManipulation--8_1.tiff
Image Size512 x 512 pixels
FormatTIFF
ModeRGB
File Size768.2 KB
Step 3: 5μm Alignment Layer Area
COMPLETE
Verify terrace cleanliness and identify suitable fabrication area
Completed: 2025-11-07 16:13:27

Scans (1):

step0_20240424-093814_Kingsbury Si(001)H--STM_AtomManipulation--12_1.tiff

File TypeImage File
Original Filenamestep0_20240424-093814_Kingsbury Si(001)H--STM_AtomManipulation--12_1.tiff
Image Size256 x 256 pixels
FormatTIFF
ModeRGB
File Size192.2 KB
Step 4: 5um Alignment Layer
COMPLETE
Pattern the ajoining alignment layer linking the micro and nano scale
Completed: 2025-11-07 16:15:46

Scans (1):

step1_20240424-093814_Kingsbury Si(001)H--STM_AtomManipulation--14_1.tiff

File TypeImage File
Original Filenamestep1_20240424-093814_Kingsbury Si(001)H--STM_AtomManipulation--14_1.tiff
Image Size256 x 256 pixels
FormatTIFF
ModeRGB
File Size192.2 KB
Step 5: 1um Zoom Onto Alignment Layer
COMPLETE
Show area for wiring up the leads
Completed: 2025-11-07 16:27:11

Scans (1):

tapers_20240424-093814_Kingsbury Si(001)H--STM_AtomManipulation--15_1.tiff

File TypeImage File
Original Filenametapers_20240424-093814_Kingsbury Si(001)H--STM_AtomManipulation--15_1.tiff
Image Size256 x 256 pixels
FormatTIFF
ModeRGB
File Size192.2 KB
Step 6: Pattern Leads and Gates
COMPLETE
Use patchwork to patterhn the leads and gates leaving a gap for the quantum dots
Completed: 2025-11-07 16:28:28

Scans (1):

alignment_20240424-093814_Kingsbury Si(001)H--STM_AtomManipulation--23_1.tiff

File TypeImage File
Original Filenamealignment_20240424-093814_Kingsbury Si(001)H--STM_AtomManipulation--23_1.tiff
Image Size256 x 256 pixels
FormatTIFF
ModeRGB
File Size192.2 KB
Step 7: Quantum Dot 1 - LHS
COMPLETE
Pattern the first quantum dot and ensure the correct gap size
Completed: 2025-11-07 16:29:10

Scans (1):

dot1_20240424-093814_Kingsbury Si(001)H--STM_AtomManipulation--28_1.tiff

File TypeImage File
Original Filenamedot1_20240424-093814_Kingsbury Si(001)H--STM_AtomManipulation--28_1.tiff
Image Size512 x 256 pixels
FormatTIFF
ModeRGB
File Size384.2 KB
Step 8: Quantum Dot 2 - Vertical
COMPLETE
Pattern the second quantum dot and junction
Completed: 2025-11-07 16:29:55

Scans (1):

dot2_20240424-093814_Kingsbury Si(001)H--STM_AtomManipulation--39_1.tiff

File TypeImage File
Original Filenamedot2_20240424-093814_Kingsbury Si(001)H--STM_AtomManipulation--39_1.tiff
Image Size256 x 512 pixels
FormatTIFF
ModeRGB
File Size384.2 KB
Step 9: Quantum Dot 3 - RHS
COMPLETE
Pattern the final quantum dot and junction
Completed: 2025-11-07 16:30:15

Scans (1):

dot3_20240424-093814_Kingsbury Si(001)H--STM_AtomManipulation--46_1.tiff

File TypeImage File
Original Filenamedot3_20240424-093814_Kingsbury Si(001)H--STM_AtomManipulation--46_1.tiff
Image Size512 x 256 pixels
FormatTIFF
ModeRGB
File Size384.2 KB
Step 10: 45 Degree Scan of Inner Device
COMPLETE
45 degree scan of the full device, showing the gates and quantum dots, useful for initial distances.
Completed: 2025-11-07 16:31:08

Scans (1):

45deg_full_20240424-093814_Kingsbury Si(001)H--STM_AtomManipulation--74_1.tiff

File TypeImage File
Original Filename45deg_full_20240424-093814_Kingsbury Si(001)H--STM_AtomManipulation--74_1.tiff
Image Size1024 x 1024 pixels
FormatTIFF
ModeRGB
File Size3072.2 KB
Step 11: Pattern 6 Contact Legs
COMPLETE
Pattern each of the 6 contact legs and ensure connection
Completed: 2025-11-07 16:32:05

Scans (5):

dot3drainleg2 - 20240424-093814_Kingsbury Si(001)H--STM_AtomManipulation--118_1.tiff

File TypeImage File
Original Filenamedot3drainleg2 - 20240424-093814_Kingsbury Si(001)H--STM_AtomManipulation--118_1.tiff
Image Size256 x 501 pixels
FormatTIFF
ModeRGB
File Size375.9 KB

keyed top gate 20240424-093814_Kingsbury Si(001)H--STM_AtomManipulation--95_1.tiff

File TypeImage File
Original Filenamekeyed top gate 20240424-093814_Kingsbury Si(001)H--STM_AtomManipulation--95_1.tiff
Image Size256 x 512 pixels
FormatTIFF
ModeRGB
File Size384.2 KB

rf leg - 20240424-093814_Kingsbury Si(001)H--STM_AtomManipulation--113_1.tiff

File TypeImage File
Original Filenamerf leg - 20240424-093814_Kingsbury Si(001)H--STM_AtomManipulation--113_1.tiff
Image Size256 x 512 pixels
FormatTIFF
ModeRGB
File Size384.2 KB

RightGateLeg - 20240424-093814_Kingsbury Si(001)H--STM_AtomManipulation--126_1.tiff

File TypeImage File
Original FilenameRightGateLeg - 20240424-093814_Kingsbury Si(001)H--STM_AtomManipulation--126_1.tiff
Image Size256 x 387 pixels
FormatTIFF
ModeRGB
File Size290.4 KB

rightgateleg-220240424-093814_Kingsbury Si(001)H--STM_AtomManipulation--125_1.tiff

File TypeImage File
Original Filenamerightgateleg-220240424-093814_Kingsbury Si(001)H--STM_AtomManipulation--125_1.tiff
Image Size256 x 492 pixels
FormatTIFF
ModeRGB
File Size369.2 KB
Step 12: Dose AsH3
COMPLETE
Completed: 2025-11-07 16:32:16

No scans recorded for this step

Step 13: Image Dosed Device
COMPLETE
Dual-bias scan of the full device at 45 degrees
Completed: 2025-11-07 16:32:43

Scans (2):

HighRes_45_LITHOMATCH_20240425-145625_Kingsbury Si(001)HAs--STM_AtomManipulation--39_1.tiff

File TypeImage File
Original FilenameHighRes_45_LITHOMATCH_20240425-145625_Kingsbury Si(001)HAs--STM_AtomManipulation--39_1.tiff
Image Size1024 x 1024 pixels
FormatTIFF
ModeRGB
File Size3072.2 KB

HighRes_45_FS_LITHOMATCH_20240425-145625_Kingsbury Si(001)HAs--STM_AtomManipulation--39_1.tiff

File TypeImage File
Original FilenameHighRes_45_FS_LITHOMATCH_20240425-145625_Kingsbury Si(001)HAs--STM_AtomManipulation--39_1.tiff
Image Size1024 x 1024 pixels
FormatTIFF
ModeRGB
File Size3072.2 KB
Step 14: Dosed Quantum Dot 1
COMPLETE
Completed: 2025-11-07 16:32:56

Scans (2):

Dot1_ES_512pix_50nm_.tiff

File TypeImage File
Original FilenameDot1_ES_512pix_50nm_.tiff
Image Size512 x 512 pixels
FormatTIFF
ModeRGB
File Size768.2 KB

Dot1_FS_512pix_50nm_.tiff

File TypeImage File
Original FilenameDot1_FS_512pix_50nm_.tiff
Image Size512 x 512 pixels
FormatTIFF
ModeRGB
File Size768.2 KB
Step 15: Dosed Quantum Dot 2
COMPLETE
Completed: 2025-11-07 16:33:07

Scans (2):

Dot2_ES_512pix_50nm-36_1.tiff

File TypeImage File
Original FilenameDot2_ES_512pix_50nm-36_1.tiff
Image Size512 x 512 pixels
FormatTIFF
ModeRGB
File Size768.2 KB

Dot2_FS_512pix_50nm-36_1.tiff

File TypeImage File
Original FilenameDot2_FS_512pix_50nm-36_1.tiff
Image Size512 x 512 pixels
FormatTIFF
ModeRGB
File Size768.2 KB
Step 16: Dosed Quantum Dot 3
COMPLETE
Completed: 2025-11-07 16:33:19

Scans (2):

Dot3_ES_512pix_50nm_30_1.tiff

File TypeImage File
Original FilenameDot3_ES_512pix_50nm_30_1.tiff
Image Size512 x 512 pixels
FormatTIFF
ModeRGB
File Size768.2 KB

Dot3_FS_512pix_50nm_30_1.tiff

File TypeImage File
Original FilenameDot3_FS_512pix_50nm_30_1.tiff
Image Size512 x 512 pixels
FormatTIFF
ModeRGB
File Size768.2 KB