Fabrication Record: Kingsbury1
Fabrication Steps
COMPLETE
Document GDS design for fabrication reference
Completed: 2025-11-07 16:13:27
Scans (1):
GDS.png
COMPLETE
Map step edge structure for alignment and future device location
Completed: 2025-11-07 16:13:27
Scans (1):
12um_highmiscut_20240424-093814_Kingsbury Si(001)H--STM_AtomManipulation--8_1.tiff
COMPLETE
Verify terrace cleanliness and identify suitable fabrication area
Completed: 2025-11-07 16:13:27
Scans (1):
step0_20240424-093814_Kingsbury Si(001)H--STM_AtomManipulation--12_1.tiff
COMPLETE
Pattern the ajoining alignment layer linking the micro and nano scale
Completed: 2025-11-07 16:15:46
Scans (1):
step1_20240424-093814_Kingsbury Si(001)H--STM_AtomManipulation--14_1.tiff
COMPLETE
Show area for wiring up the leads
Completed: 2025-11-07 16:27:11
Scans (1):
tapers_20240424-093814_Kingsbury Si(001)H--STM_AtomManipulation--15_1.tiff
COMPLETE
Use patchwork to patterhn the leads and gates leaving a gap for the quantum dots
Completed: 2025-11-07 16:28:28
Scans (1):
alignment_20240424-093814_Kingsbury Si(001)H--STM_AtomManipulation--23_1.tiff
COMPLETE
Pattern the first quantum dot and ensure the correct gap size
Completed: 2025-11-07 16:29:10
Scans (1):
dot1_20240424-093814_Kingsbury Si(001)H--STM_AtomManipulation--28_1.tiff
COMPLETE
Pattern the second quantum dot and junction
Completed: 2025-11-07 16:29:55
Scans (1):
dot2_20240424-093814_Kingsbury Si(001)H--STM_AtomManipulation--39_1.tiff
COMPLETE
Pattern the final quantum dot and junction
Completed: 2025-11-07 16:30:15
Scans (1):
dot3_20240424-093814_Kingsbury Si(001)H--STM_AtomManipulation--46_1.tiff
COMPLETE
45 degree scan of the full device, showing the gates and quantum dots, useful for initial distances.
Completed: 2025-11-07 16:31:08
Scans (1):
45deg_full_20240424-093814_Kingsbury Si(001)H--STM_AtomManipulation--74_1.tiff
COMPLETE
Pattern each of the 6 contact legs and ensure connection
Completed: 2025-11-07 16:32:05
Scans (5):
dot3drainleg2 - 20240424-093814_Kingsbury Si(001)H--STM_AtomManipulation--118_1.tiff
keyed top gate 20240424-093814_Kingsbury Si(001)H--STM_AtomManipulation--95_1.tiff
rf leg - 20240424-093814_Kingsbury Si(001)H--STM_AtomManipulation--113_1.tiff
RightGateLeg - 20240424-093814_Kingsbury Si(001)H--STM_AtomManipulation--126_1.tiff
rightgateleg-220240424-093814_Kingsbury Si(001)H--STM_AtomManipulation--125_1.tiff
COMPLETE
Completed: 2025-11-07 16:32:16
No scans recorded for this step
COMPLETE
Dual-bias scan of the full device at 45 degrees
Completed: 2025-11-07 16:32:43
Scans (2):
HighRes_45_LITHOMATCH_20240425-145625_Kingsbury Si(001)HAs--STM_AtomManipulation--39_1.tiff
HighRes_45_FS_LITHOMATCH_20240425-145625_Kingsbury Si(001)HAs--STM_AtomManipulation--39_1.tiff
COMPLETE
Completed: 2025-11-07 16:32:56
Scans (2):
Dot1_ES_512pix_50nm_.tiff
Dot1_FS_512pix_50nm_.tiff
COMPLETE
Completed: 2025-11-07 16:33:07
Scans (2):
Dot2_ES_512pix_50nm-36_1.tiff
Dot2_FS_512pix_50nm-36_1.tiff
COMPLETE
Completed: 2025-11-07 16:33:19
Scans (2):
Dot3_ES_512pix_50nm_30_1.tiff
Dot3_FS_512pix_50nm_30_1.tiff